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Description
Ionization source & Bias power supply
No. of targets:16~26;
Power of BIAS: 30kW~45kW.
The proposed coating system is the PVD COATING SYSTEM TYPE STN-20D30. The STN-20D30 has an enlarged loadingcapacity and has been specially designed for large volume products decorative coating. For large volume products the STN-20D30 offers an unsurpassed productivity. This equipment is especially developed for those applications requiring extreme large coating space, high loading capacity, low temperatures (<300 ℃) and short cycle times. This makes this system especially well suited for decorative parts.The vacuum chamber unit has a cylinder design with one door opened on the top of the process chamber and 26 (twenty-six) cathode Arc Ion Sources.Inner size of the chamber --- Diameter: 1500~1800mm?Height: 2000mm~3500mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen OR PLC & PC
| Specification | |
| Model | STN-20FD30 |
| Process Chamber | Φ1800mm*H3500mm |
| Pumping System | |
| Backing Pump | Rotary vane pump with 252m3/h (4 set) |
| Roots Pump | Roots pump with 1080m3/h (2 set) |
| Diffusion Pump | Oil diffusion pump with 81000m3/h (2 set) |
| Hold Pump | Rotary vane pump with 108m3/h (2 set) |
| System Control | PLC touch screen & PC control |
| Cathodes | 26 unit |
| Cathodes Power | Max 160A |
| Bias Power Supply | 180KW,0-1000V |
| Process Gas System | |
| 500sccm | 2 unit |
| 1000sccm | 2 unit |
| Heating System | 0-24KW , PID contol |
| Power | 380V three phase four line |
| Turntable | |
| Driving System | 6*4unit,rotation,revolution |
| Driving Control | 0-18rpm (variable) |
| Cooling Water System | PL-08 (optional) |
| Oven | 8KW,800*800*1000mm (optional) |
| Place of Origin | Currency | ||
|---|---|---|---|
| Payment Method | Minimum Order | ||
| Delivery Time | Delivery | ||
| Packaging | Supply Ability |
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Company Name:
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Contact Person:Aiven Yang
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Country:China [CN]
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Phone Number:
Fax Number:
MSN:
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